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Tower Semiconductor Will Use New Vision Systems` ARGUS Lithography Advanced

Wednesday 1st January 2003

Tower Semiconductor will use New Vision Systems' ARGUS lithography advanced process control (APC) technology in the 200mm Fab 2. This facility will produce Flash memory and CMOS image sensor devices using several advanced methods, such as field stitching, which challenge conventional APC systems. ARGUS supports real-time monitoring and feedback control of high volume patterning processes.
Tower Semiconductor will use New Vision Systems' ARGUS lithography advanced
process control (APC) technology in the 200mm Fab 2. This facility will
produce Flash memory and CMOS image sensor devices using several advanced
methods, such as field stitching, which challenge conventional APC systems.
ARGUS supports real-time monitoring and feedback control of high volume
patterning processes.

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